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HISDFA100 butterfly valve

HISDFA100 butterfly valve

Valve Type

Exhaust throttle valve is a key component in the vacuum field, which is a precise fluid control device widely used in key processes such as etching, diffusion, and deposition in the semiconductor industry; The exhaust throttle valve changes the cross-sectional area of the fluid channel through the rotation of the butterfly plate, achieving control over fluid flow rate and pressure, and maintaining the vacuum degree of special processes.

The exhaust throttle valve developed and produced by HIScience not only meets the key performance indicators of foreign butterfly valves, but also improves the structure of the valve body and control part, has high response speed, and enhances the service life of the valve body, with higher reliability.

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Product Parameters

Technical DataTechnical Data

ClassificationProjectParameter
Basic ParametersInstallation MethodFlanged
Nominal Diameter100 mm
Range of work pressure7 Pa ~ 101.325 kPa
Working Voltage24±10% V DC
Operating Current0~0.6 mA
Control methodRS422/485 Pressure control/Angle control
Valve Torque3 Nm
Electrical portPower supplyDB-9 Male connector
SensorDB-15 Female head
InterfaceDB-25 Female head
ServiceDB-9 Female head
Temperature parameterWorking temperature - Valve body0°C~200°C
Working Temperature - Control Section0°C~60°C
Storage temperature-20°C~80°C
Lifespan and mediumLoad cycle≥6 months
MediumAir, argon, ammonia, silane, methane, nitrogen, nitrous oxide (N ₂ O), nitrogen carbide
Gas contact materialValve body316L Stainless steel
Sealing elementFFKM

Overall DimensionsOverall Dimensions

Product DrawingProduct Drawing

After ServiceAfter Service

To provide solid support for all after-sales services, ensuring service quality and efficiency:

1. National service outlets:Establishing service outlets and testing centers in major industrial cities in China to achieve regional service coverage and shorten on-site service response time;

2. Original factory engineering team:All service engineers have undergone professional training and assessment, possess the ability to debug, repair, and calibrate sensors/joint modules throughout the entire process, and are certified to work;

3. Standardized service process:Establish a standardized process from service acceptance, fault diagnosis, solution, service execution, and after-sales follow-up to ensure that every service is recorded, tracked, and guaranteed;

4. Service quality follow-up:After all services are completed, Follow up with customers within 72 hours, collect customer feedback, and continuously optimize service processes and quality.

Promise to quickly solve problems within 12 hours, respond promptly within 24 hours, and conduct on-site repairs within 36 hours.

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